案例｜VPI高真空直流溅射镀膜系统（SD-650MH）- 落地华南师范大学

近日，VPI高真空直流溅射镀膜系统SD-650MH在华南师范大学完成安装，为科研与实验教学提供便捷的薄膜制备平台。

该系统采用台式一体化设计，集成高真空机组、电源控制系统、流量控制、冷却及镀膜腔体。腔体配备可视观察窗，便于研究人员掌握抽真空与放电镀膜状态。设备占地小、操作门槛低、维护便捷，既能满足高校科研需求，也有助于降低前期投入和后续使用成本，体现出良好的科研性价比。

依托稳定的高真空环境与直流放电能力，该设备可用于金属及功能薄膜制备，支持材料表面改性、导电膜、电极层、传感材料、光电功能材料等方向的工艺探索。用于样品验证、参数筛选及教学演示时，可缩短从实验构想到样品制备的路径，提高科研效率。

从方案配置到现场安装，VPI始终以实际需求为出发点，提供高适配、易使用、可持续服务的薄膜制备解决方案，让专业真空镀膜设备成为高校实验室用得起、用得顺、用得久的科研工具。

Case Study | VPI High-Vacuum DC Sputter Coating System (SD-650MH) Installed at South China Normal University

VPI recently completed the installation of its SD-650MH High-Vacuum DC Sputter Coating System at South China Normal University, providing a convenient and reliable thin-film deposition platform for scientific research and laboratory teaching.

Featuring a compact, integrated benchtop design, the system combines a high-vacuum pumping unit, power supply and control system, gas flow control, cooling unit, and deposition chamber. The chamber is equipped with a viewing window, allowing researchers to monitor the evacuation and plasma discharge processes in real time. With its small footprint, intuitive operation, and straightforward maintenance, the SD-650MH meets the practical needs of university laboratories while helping reduce both initial investment and ongoing operating costs, delivering excellent value for research applications.

Supported by a stable high-vacuum environment and reliable DC discharge performance, the system is suitable for depositing metallic and functional thin films. It enables process development in areas including surface modification, conductive coatings, electrode layers, sensing materials, and optoelectronic functional materials. For sample validation, process parameter screening, and teaching demonstrations, the system helps shorten the path from experimental concept to coated sample and improves overall research efficiency.

From system configuration to on-site installation, VPI remains focused on real-world research requirements. By providing adaptable, user-friendly, and sustainably supported thin-film deposition solutions, VPI makes professional vacuum coating technology more accessible, practical, and dependable for university laboratories.