案例｜VPI高真空直流溅射镀膜系统（SD-650MH）- 落地华南师范大学

近日，VPI高真空直流溅射镀膜系统SD-650MH在华南师范大学完成安装，为科研与实验教学提供便捷的薄膜制备平台。

该系统采用台式一体化设计，集成高真空机组、电源控制系统、流量控制、冷却及镀膜腔体。腔体配备可视观察窗，便于研究人员掌握抽真空与放电镀膜状态。设备占地小、操作门槛低、维护便捷，既能满足高校科研需求，也有助于降低前期投入和后续使用成本，体现出良好的科研性价比。

依托稳定的高真空环境与直流放电能力，该设备可用于金属及功能薄膜制备，支持材料表面改性、导电膜、电极层、传感材料、光电功能材料等方向的工艺探索。用于样品验证、参数筛选及教学演示时，可缩短从实验构想到样品制备的路径，提高科研效率。

从方案配置到现场安装，VPI始终以实际需求为出发点，提供高适配、易使用、可持续服务的薄膜制备解决方案，让专业真空镀膜设备成为高校实验室用得起、用得顺、用得久的科研工具。

Case Study | VPI High-Vacuum DC Sputter Coating System (SD-650MH) Installed at South China Normal University

VPI recently completed the installation of its SD-650MH High-Vacuum DC Sputter Coating System at South China Normal University, providing a convenient and reliable thin-film deposition platform for scientific research and laboratory teaching.

Featuring a compact, integrated benchtop design, the system combines a high-vacuum pumping unit, power supply and control system, gas flow control, cooling unit, and deposition chamber. The chamber is equipped with a viewing window, allowing researchers to monitor the evacuation and plasma discharge processes in real time. With its small footprint, intuitive operation, and straightforward maintenance, the SD-650MH meets the practical needs of university laboratories while helping reduce both initial investment and ongoing operating costs, delivering excellent value for research applications.